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Your selections:
Instrumentation techniques for the control of MEMS nanopositioners
- Moore, Steven
Zero displacement microelectromechanical force sensor using feedback control
- Coskun, M. Bulut, Moore, Steven, Moheimani, S. O. Reza, Neild, Adrian, Alan, Tuncay
MEMS resonator with displacement sensor based on electro-thermal principles
- Moore, Steven, Moheimani, S. O. Reza
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